Apparatus for distributing load and system for treating substrate with the apparatus

ABSTRACT

Provided are a load distribution apparatus capable of efficiently distributing loads for a plurality of inkjet head modules and a substrate treatment system including the same. The load distribution apparatus includes a second support formed to be elongated in one direction and having both side portions higher than a central portion and in which a head module for discharging droplets onto a substrate is installed in the central portion, a first support supporting the second support on at least one side and supporting the second support below the second support, a first support unit supporting the second support on at least one side and supporting the second support above the second support, and a plate installed above the first support unit and connected to the first support unit, wherein a load of the head module is distributed by the first support and the first support unit.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application claims priority from Korean Patent Application No.10-2020-0049568 Filed on Apr. 23, 2020, in the Korean IntellectualProperty Office, the disclosure of which is incorporated herein byreference in its entirety.

FIELD OF THE DISCLOSURE

The present disclosure relates to a load distribution apparatus and asubstrate treatment system including the same. More specifically, thepresent disclosure relates to a load distribution apparatus for aplurality of inkjet head modules and a substrate treatment systemincluding the same.

DESCRIPTION OF THE RELATED ART

When a printing process is performed on a transparent substrate in orderto manufacture a display device such as a liquid crystal display (LCD)device, printing equipment including an inkjet head module may be used.

SUMMARY OF THE INVENTION

An inkjet head module discharges ink or the like onto a substrate. Theinkjet head module may be supported by a gantry unit and disposed on asubstrate to perform such a function. A plurality of inkjet head modulesmay be installed in the gantry unit in order to discharge ink or thelike onto a substrate of various sizes (e.g., a large-area substrate).

However, when the plurality of inkjet head modules are installed in thegantry unit, an occurrence of distortion (e.g., a yaw) in each shaft ofthe gantry unit may increase due to a weight of the inkjet head module,and mechanical deformation due to thermal deformation may increase.

Aspects of the present disclosure provide a load distribution apparatuscapable of efficiently distributing loads for the plurality of inkjethead modules, and a substrate treatment system including the same.

It should be noted that objects of the present disclosure are notlimited to the above-described objects, and other objects of the presentdisclosure will be apparent to those skilled in the art from thefollowing descriptions.

A load distribution apparatus according to an aspect of the presentdisclosure includes a second support formed to be elongated in onedirection and having both side portions higher than a central portionand in which a head module discharging droplets onto a substrate isinstalled in the central portion, a first support configured to supportthe second support on at least one side and support the second supportbelow the second support, a first support unit configured to support thesecond support on at least one side and support the second support abovethe second support, and a plate installed above the first support unitand connected to the first support unit, wherein a load of the headmodule is distributed by the first support and the first support unit.

The first support unit may support the second support in a non-contactmanner.

The first support unit may support the second support using a magnetmember, and the plate may be formed of a metal component as a material.

The magnet member may include at least one of a permanent magnet and anelectromagnet.

When the magnet member includes both the permanent magnet and theelectromagnet, the permanent magnet may be disposed on both sides of theelectromagnet.

When the permanent magnet is disposed on the both sides of theelectromagnet, the permanent magnet disposed on one side of theelectromagnet may have a different polarity from the permanent magnetdisposed on the other side of the electromagnet.

The magnet member may include a plurality of magnets.

At least one the first support unit may be installed on each side.

The first support units may be installed on at least both sides, and thenumber of the first support units installed on each side may be thesame.

The first support unit may move the second support according to adirection in which a magnetic field is formed.

The load distribution apparatus may further include a second supportunit installed on the first support and configured to support the secondsupport in a non-contact manner.

The second support unit may be an air bearing.

The loads of the head module of different amounts may be distributed tothe first support unit and the second support unit.

The load distribution apparatus may further include a height controlmember configured to adjust a height of the plate.

The second support may be installed to be movable on the first support.

The head module may be installed on a side surface or bottom of thesecond support and may be installed to be movable in a lateraldirection.

The first support unit and the second support unit may support thesecond support using members of different types.

In addition, a load distribution apparatus according to another aspectof the present disclosure includes a second support formed to beelongated in one direction and having both side portions higher than acentral portion and in which a head module discharging droplets onto asubstrate is installed in the central portion, a first supportconfigured to support the second support on at least one side andsupport the second support below the second support, a first supportunit configured to support the second support on at least one side andsupport the second support above the second support, a plate installedabove the first support unit and connected to the first support unit,and a second support unit installed on the first support and configuredto support the second support in a non-contact manner, wherein a load ofthe head module is distributed by the first support and the firstsupport unit, and the first support unit and the second support unitsupport the second support using members of different types.

In addition, a substrate treatment system according to an aspect of thepresent disclosure includes a base, a substrate support unit installedon the base and configured to support a substrate, and a loaddistribution apparatus installed on the base and including a head moduledischarging droplets onto the substrate, wherein the load distributionapparatus includes a second support formed to be elongated in onedirection and having both side portions higher than a central portionand in which the head module discharging droplets onto the substrate isinstalled in the central portion, a first support configured to supportthe second support on at least one side and support the second supportbelow the second support, a first support unit configured to support thesecond support on at least one side and support the second support abovethe second support, and a plate installed above the first support unitand connected to the first support unit, and a load of the head moduleis distributed by the first support and the first support unit.

The substrate treatment system may be printing equipment.

Specific details of other exemplary embodiments are included in thespecific description and the drawings.

BRIEF DESCRIPTION OF THE DRAWINGS

The above and other aspects and features of the present disclosure willbecome more apparent by describing exemplary embodiments thereof indetail with reference to the attached drawings, in which:

FIG. 1 is a perspective view schematically illustrating an internalstructure of a general substrate treatment system;

FIG. 2 is a plan view schematically illustrating the internal structureof the general substrate treatment system;

FIG. 3 is a cross-sectional view schematically illustrating a structureof a load distribution apparatus according to a first exemplaryembodiment of the present disclosure;

FIG. 4 is a cross-sectional view schematically illustrating a structureof a load distribution apparatus according to a second exemplaryembodiment of the present disclosure;

FIG. 5 is a cross-sectional view schematically illustrating a structureof a load distribution apparatus according to a third exemplaryembodiment of the present disclosure;

FIG. 6 is a cross-sectional view schematically illustrating a structureof a load distribution apparatus according to a fourth exemplaryembodiment of the present disclosure;

FIG. 7 is a cross-sectional view schematically illustrating a structureof a load distribution apparatus according to a fifth exemplaryembodiment of the present disclosure;

FIG. 8 is a cross-sectional view schematically illustrating a structureof a load distribution apparatus according to a sixth exemplaryembodiment of the present disclosure;

FIG. 9 is a cross-sectional view schematically illustrating a structureof a load distribution apparatus according to a seventh exemplaryembodiment of the present disclosure;

FIG. 10 is a cross-sectional view schematically illustrating a structureof a load distribution apparatus according to an eighth exemplaryembodiment of the present disclosure;

FIG. 11 is a cross-sectional view schematically illustrating a structureof a load distribution apparatus according to a ninth exemplaryembodiment of the present disclosure;

FIG. 12 is a cross-sectional view schematically illustrating a structureof a load distribution apparatus according to a tenth exemplaryembodiment of the present disclosure;

FIG. 13 is a cross-sectional view schematically illustrating a structureof a load distribution apparatus according to an eleventh exemplaryembodiment of the present disclosure;

FIG. 14 is a cross-sectional view schematically illustrating a structureof a load distribution apparatus according to a twelfth exemplaryembodiment of the present disclosure;

FIG. 15 is a cross-sectional view schematically illustrating a structureof a load distribution apparatus according to a thirteenth exemplaryembodiment of the present disclosure;

FIG. 16 is a cross-sectional view schematically illustrating a structureof a load distribution apparatus according to a fourteenth exemplaryembodiment of the present disclosure;

FIG. 17 is a cross-sectional view schematically illustrating a structureof a load distribution apparatus according to a fifteenth exemplaryembodiment of the present disclosure;

FIG. 18 is a cross-sectional view schematically illustrating a structureof a load distribution apparatus according to a sixteenth exemplaryembodiment of the present disclosure; and

FIG. 19 is a cross-sectional view schematically illustrating a structureof a load distribution apparatus according to a seventeenth exemplaryembodiment of the present disclosure.

DETAILED DESCRIPTION OF THE EXEMPLARY EMBODIMENTS

Hereinafter, exemplary embodiments of the present disclosure will bedescribed in detail with reference to the accompanying drawings.Advantages and features of the present disclosure and methods forachieving them will be apparent with reference to the exemplaryembodiments described below in detail with reference to the accompanyingdrawings. However, the present disclosure is not limited to theexemplary embodiments disclosed below but may be implemented indifferent forms, and only these exemplary embodiments are provided tocomplete the disclosure of the present disclosure, and to fully informthe scope of the invention to those of ordinary skill in the art towhich the present disclosure pertains, that is, the present disclosureis defined only by the scope of the claims. The same reference numeralsrefer to the same elements throughout the specification.

When an element or layer is referred to as “on” another element orlayer, this includes not only directly on another element or layer butalso having another layer or element interposed therebetween. On theother hand, when an element is referred to as “directly on”, thisindicates that another element or layer is interposed therebetween.

Spatially relative terms such as “below”, “beneath”, “lower”, “above”,“upper”, etc. can be used to easily describe the correlation between anelement or components and another element or components. The spatiallyrelative terms should be understood as terms including differentdirections of the element when in use or operating in addition todirections shown in the drawings. For example, when an element shown inthe drawing is turned over, an element described as “below” or “beneath”another element may be placed “above” another element. Therefore, theexemplary term “below” may include both directions below and above. Theelement may be oriented in another direction, and thus the spatiallyrelative terms may be interpreted according to the orientation.

Although the terms “first”, “second”, etc. are used to describe variouselements, components, and/or sections, it should be understood thatthese elements, components and/or sections are not limited by theseterms. These terms are only used to distinguish one element, componentor section from another element, component or section. Therefore, itgoes without saying that a first element, a first component, or a firstsection mentioned below may be a second element, a second component, ora second section within the technical scope of the present disclosure.

The terms used in the present specification are for describing exemplaryembodiments and are not intended to limit the present disclosure. Inthis specification, the singular form also includes the plural formunless specifically stated in the phrase. As used in the specification,“comprises” and/or “comprising” does not preclude elements, steps,actions and/or elements mentioned and the presence or addition of one ormore another component, steps, actions and/or elements.

When there is no other definition, all terms used in the specification(including technical and scientific terms) may be used with the samemeaning that is commonly understood by one of ordinary skill in the artto which this disclosure belongs. In addition, the terms, such as thosedefined in commonly used dictionaries, are not to be ideally orover-interpreted unless expressly otherwise defined.

Hereinafter, the exemplary embodiments of the present disclosure will bedescribed in detail with reference to the accompanying drawings. In thefollowing description with the accompanying drawings, the same orcorresponding components are designated by the same reference numeralsregardless of drawing numbers, and duplicate description thereof will beomitted.

The present disclosure relates to a load distribution apparatus capableof distributing loads for a plurality of inkjet head modules, and asubstrate treatment system including the same. The load distributionapparatus according to the present disclosure may reduce a supportweight applied to a driving shaft by distributing loads for theplurality of inkjet head modules and may minimize a temperature changeto reduce mechanical deformation.

Hereinafter, the present disclosure will be described in detail withreference to the drawings.

FIG. 1 is a perspective view schematically illustrating an internalstructure of a general substrate treatment system. In addition, FIG. 2is a plan view schematically illustrating the internal structure of thegeneral substrate treatment system.

The substrate treatment system is for treating a substrate. Such asubstrate treatment system may be implemented as printing equipment thatdischarges ink or the like onto the substrate using, for example, aninkjet head module.

Hereinafter, a case in which the substrate treatment system is theprinting equipment will be described as an example.

Referring to FIGS. 1 and 2 , printing equipment 100 may include a base110, a substrate support unit 120, a gantry unit 130, a gantry movingunit 140, an inkjet head module 150, a head moving unit 160, a dropletdischarge amount measuring unit 170, and a nozzle inspection unit 180.

The base 110 constitutes a body of the printing equipment 100. The base110 may be provided in a rectangular parallelepiped shape having apredetermined thickness. Meanwhile, the substrate support unit 120 maybe disposed on an upper surface of the base 110.

The substrate support unit 120 supports a substrate S. The substratesupport unit 120 may include a support plate 121 on which the substrateS is placed.

The support plate 121 is one on which the substrate S is seated. Thesupport plate 121 may be a flat plate having a quadrangular shape.Meanwhile, a rotation driving member 122 may be connected to a lowersurface of the support plate 121.

The rotation driving member 122 rotates the support plate 121. To thisend, the rotation driving member 122 may be implemented as a rotationmotor. The rotation driving member 122 may rotate the support plate 121using a rotation center shaft formed in a direction perpendicular to thesupport plate 121.

When the support plate 121 is rotated by the rotation driving member122, the substrate S may also rotate along the support plate 121. Forexample, when a long side direction of a cell formed on the substrate Sto which the droplet is to be applied is toward a second direction 20,the rotation driving member 122 may rotate the substrate so that thelong side direction of the cell faces a first direction 10.

A linear driving member 123 linearly moves the support plate 121 and therotation driving member 122. The linear driving member 123 may linearlymove the support plate 121 and the rotation driving member 122 in thefirst direction 10.

The linear driving member 123 may include a slider 124 and a guidemember 125. In this case, the rotation driving member 122 may beinstalled on an upper surface of the slider 124.

The guide member 125 may extend from a center portion of the uppersurface of the base 110 in the first direction 10 as a longitudinaldirection. A linear motor (not shown) may be built in the slider 124,and the slider 124 may be linearly moved in the first direction 10 alongthe guide member 125 by the linear motor.

The gantry unit 130 supports a plurality of inkjet head modules 150. Thegantry unit 130 may be provided above a path through which the supportplate 121 is moved.

The gantry unit 130 may be spaced apart from the upper surface of thebase 110 in an upward direction. In addition, the gantry unit 130 may bedisposed such that a longitudinal direction thereof faces the seconddirection 20.

The gantry moving unit 140 linearly moves the gantry unit 130 in thefirst direction 10. The gantry moving unit 140 may include a firstmoving unit 141 and a second moving unit 142.

The first moving unit 141 may be provided at one end of the gantry unit130, and the second moving unit 142 may be provided at the other end ofthe gantry unit 130. In this case, the first moving unit 141 mayslidingly move along a first guide rail 211 provided on one side of thebase 110, and the second moving unit 142 may slidingly move along asecond guide rail 212 provided on the other side of the base 110 tolinearly move the gantry unit 130 in the first direction 10.

The inkjet head module 150 discharges droplets such as ink onto thesubstrate S. The inkjet head module 150 may be installed on a sidesurface of the gantry unit 130 and supported by the gantry unit 130.

The inkjet head module 150 may linearly move in the longitudinaldirection of the gantry unit 130, that is, in the second direction 20due to the head moving unit 160, and may also linearly move in a thirddirection 30. In addition, the inkjet head module 150 may also rotateabout an axis parallel to the third direction 30 with respect to thehead moving unit 160.

The plurality of inkjet head modules 150 may be provided on the gantryunit 130. Three inkjet head modules 150, for example, a first head unit151, a second head unit 152, and a third head unit 153 may be provided.For example, the plurality of inkjet head modules 150 may be coupled tothe gantry unit 130 in a line in the second direction 20.

The inkjet head module 150 may include a plurality of nozzles (notshown) discharging droplets and a nozzle plate (not shown) on which theplurality of nozzles are formed. For example, 128 nozzles or 256 nozzlesmay be provided in the inkjet head module 150.

The inkjet head module 150 may be provided with a number ofpiezoelectric elements corresponding to the plurality of nozzles. Anamount of droplets discharged from the plurality of nozzles may beindependently adjusted by controlling a voltage applied to thepiezoelectric element.

The head moving unit 160 linearly moves the inkjet head module 150. Thehead moving unit 160 may be provided in the printing equipment 100corresponding to the number of inkjet head modules 150. For example,when three inkjet head units 150 such as the first head unit 151, thesecond head unit 152, and the third head unit 153 are provided, threehead moving units 160 may also be provided.

Meanwhile, one head moving unit 160 may be provided, and in this case,the inkjet head modules 150 may be moved together at the same timewithout moving individually.

The droplet discharge amount measuring unit 170 measures the dropletdischarge amount of the inkjet head module 150. The droplet dischargeamount measuring unit 170 may be disposed on one side of the substratesupport unit 120 on the base 110.

The droplet discharge amount measuring unit 170 may measure an amount ofdroplets discharged from all nozzles for each inkjet head module 150.Whether all nozzles of the inkjet head module 150 are abnormal may bechecked macroscopically through the measurement of the droplet dischargeamount of the inkjet head module 150. That is, when the dropletdischarge amount of the inkjet head module 150 deviates from a referencevalue, it can be seen that at least one of the inkjet head modules 150has an abnormality.

The inkjet head module 150 may be moved in the first direction 10 andthe second direction 20 by the gantry moving unit 140 and the headmoving unit 160 to be positioned above the droplet discharge amountmeasuring unit 170. The head moving unit 160 may move the inkjet headmodule 150 in the third direction 30 to adjust a vertical distancebetween the inkjet head module 150 and the droplet discharge amountmeasuring unit 170.

The nozzle inspection unit 180 checks whether an individual nozzleprovided in the inkjet head module 150 is abnormal. For example, thenozzle inspection unit 180 may check whether an individual nozzle isabnormal through optical inspection.

As a result of macroscopically checking whether the nozzle in thedroplet discharge amount measuring unit 170 is abnormal, when it isdetermined that there is an abnormality in an unspecified nozzle, thenozzle inspection unit 180 may perform the total inspection of thenozzle while checking whether the individual nozzle is abnormal.

The nozzle inspection unit 180 may be disposed on one side of thesubstrate support unit 120 on the base 110. The inkjet head module 150may be moved in the first direction 10 and the second direction 20 bythe gantry moving unit 140 and the head moving unit 160 to be positionedabove the nozzle inspection unit 180. The head moving unit 160 may movethe inkjet head module 150 in the third direction 30 to adjust avertical distance between the inkjet head module 150 and the nozzleinspection unit 180.

Meanwhile, the printing equipment 100 may further include a dropletsupply device 190.

The droplet supply device 190 may be installed on upper and sideportions of the gantry unit 130. The droplet supply device 190 mayinclude a droplet supply module 191 and a pressure control module 192.

The droplet supply module 191 supplies a liquid such as ink to theinkjet head module 150. After receiving the liquid from a storage tank(not shown) storing the liquid, the droplet supply module 191 may supplythe liquid to the inkjet head module 150.

The pressure control module 192 controls pressure of the droplet supplymodule 191. The pressure control module 192 may control the pressure ofthe droplet supply module 191 by providing positive pressure or negativepressure to the droplet supply module 191.

Meanwhile, the droplet supply module 191 and the pressure control module192 may be coupled to the gantry unit 130.

The gantry unit 130 may support the plurality of inkjet head modules150. However, in this case, a distortion phenomenon may occur in eachshaft of the gantry unit 130 due to a weight of the inkjet head module150, and accordingly, a yaw may occur. In addition, a temperatureincreases due to an increase in load of a motor during operation of theequipment, and thus mechanical deformation due to thermal deformationmay increase.

As described above, the gantry unit 130 needs to provide a method ofreducing the weight and a method of minimizing a temperature change tosupport the plurality of inkjet head modules 150. However, there isdifficulty in dealing with mechanical deformation in applying the abovemethod to a conventional gantry unit.

Accordingly, in the exemplary embodiment, a load distribution apparatuscapable of efficiently distributing loads for a plurality of inkjet headmodules instead of the conventional gantry unit is proposed.Hereinafter, this will be described.

FIG. 3 is a cross-sectional view schematically illustrating a structureof a load distribution apparatus according to a first exemplaryembodiment of the present disclosure.

Referring to FIG. 3 , a load distribution apparatus 300 may include afirst support 310, a second support 320, a first support unit 330, and aplate 340.

The first support 310 supports the second support 320 on which theinkjet head module 150 is installed. The first support 310 may beprovided with two first supports 311 and 312 to support the secondsupport 320 from both sides.

However, this exemplary embodiment is not limited thereto. As shown inFIG. 4 , the first support 310 may be provided with one first support311 to support the second support 320 from one side. FIG. 4 is across-sectional view schematically illustrating a structure of a loaddistribution apparatus according to a second exemplary embodiment of thepresent disclosure.

Meanwhile, the first supports 310 may be provided with three or more tosupport the second support 320 from at least one side.

This will be described again with reference to FIG. 3 .

The first support 310 may move along a guide rail installed on the base110. For example, when the first support 310 is provided with two firstsupport 311 and 312, one first support 311 may move along the firstguide rail 211, the other first support 312 may move along the secondguide rail 212.

The first support 310 may move in one direction on the base 110. Forexample, the first support 310 may move in the first direction 10 on thebase 110. However, this exemplary embodiment is not limited thereto. Thefirst support 310 may also move in a plurality of directions on the base110. For example, the first support 310 may move in the first direction10 and the second direction 20 on the base 110.

When the first support 310 moves in at least one of the first direction10, the second direction 20, and the third direction 30, the firstsupport 310 may move in a straight line on the base 110. However, thisexemplary embodiment is not limited thereto. The first support 310 maymove in a curve on the base 110 or may move diagonally on the base 110.

The second support 320 has the plurality of inkjet head modules 150installed thereon. The second support 320 may be supported by the firstsupport 310.

The second support 320 may be formed with the second direction 20 as alength direction. At this time, both side portions of the second support320 may be formed higher in the third direction 30 than a center portionthereof, and the plurality of inkjet head modules 150 may be installedin the center portion of the second support 320.

The second support 320 may move on the base 110 so that the plurality ofinkjet head modules 150 may discharge droplets to a designated positionon the substrate S. The second support 320 may be moved on the base 110by the first support 310.

However, this exemplary embodiment is not limited thereto. The secondsupport 320 may move on the base 110 separately (i.e., independently)from the first support 310. In this case, the second support 320 maymove on the first support 310 along a guide rail installed on the firstsupport 310. The second support 320 may move, for example, on the firstsupport 310 along a third guide rail 221 installed on one first support311 and along a fourth guide rail 222 installed on the other firstsupport 312, as shown in FIG. 5 . FIG. 5 is a cross-sectional viewschematically illustrating a structure of a load distribution apparatusaccording to a third exemplary embodiment of the present disclosure.

When the second support 320 moves along the guide rail installed on thefirst support 310, the second support 320 may move in one direction onthe first support 310. For example, the second support 320 may move inthe first direction 10 on the first support 310. However, this exemplaryembodiment is not limited thereto. The second support 320 may move in aplurality of directions on the first support 310. For example, thesecond support 320 may move in the first direction 10 and the seconddirection 20 on the first support 310.

When the second support 320 moves in at least one of the first direction10, the second direction 20, and the third direction 30, the secondsupport 320 may move in a straight line on the first support 310.However, this exemplary embodiment is not limited thereto. The secondsupport 320 may move in a curve on the first support 310 or may movediagonally on the first support 310.

Meanwhile, when the second support 320 moves along the guide railinstalled on the first support 310, the first support 310 may be fixedlyinstalled on the base 110.

This will be described again with reference to FIG. 3 .

As described above, the inkjet head module 150 may be installed on thesecond support 320 in plural. For example, the inkjet head module 150including n inkjet head modules such as a first inkjet head module 150a, a second inkjet head module 150 b, . . . , and an n-th inkjet headmodule 150 n (where n is a natural number of 2 or more) may be installedon the second support 320. However, this exemplary embodiment is notlimited thereto. The inkjet head module 150 may be installed in a singleunit on the second support 320.

The inkjet head module 150 may be installed on a side surface of thesecond support 320 to effectively discharge droplets onto the substrateS. However, this exemplary embodiment is not limited thereto. The inkjethead module 150 may be installed under the second support 320 as shownin FIG. 6 . FIG. 6 is a cross-sectional view schematically illustratinga structure of a load distribution apparatus according to a fourthexemplary embodiment of the present disclosure.

The inkjet head module 150 may be fixedly installed on the secondsupport 320. However, this exemplary embodiment is not limited thereto.The inkjet head module 150 may be installed to be movable on the secondsupport 320.

When the inkjet head module 150 is installed on the side surface of thesecond support 320, as shown in FIG. 7 , the inkjet head module 150 maybe installed to be movable in a lateral direction (e.g., a positive(plus) second direction 20, a negative (minus) second direction 20,etc.). However, this exemplary embodiment is not limited thereto. Theinkjet head module 150 may be installed to be movable in a verticaldirection (e.g., a positive third direction 30, a negative thirddirection 30, etc.). FIG. 7 is a cross-sectional view schematicallyillustrating a structure of a load distribution apparatus according to afifth exemplary embodiment of the present disclosure.

Meanwhile, when the inkjet head module 150 is installed under the secondsupport 320, the inkjet head module 150 may be installed to be movablein the second direction 20 and may also be installed to be movable inthe first direction 10.

This will be described again with reference to FIG. 3 .

The first support unit 330 is for supporting the second support 320 onwhich the plurality of inkjet head modules 150 are installed. The firstsupport unit 330 may support the second support 320 on at least one sidealong with the first support 310.

When the first support unit 330 and the first support 310 support thesecond support 320 together, the first support unit 330 and the firstsupport 310 may support the second support 320 on the upper and lowerportions with the second support 320 interposed therebetween,respectively. For example, the first support unit 330 may support thesecond support 320 above the second support 320, and the first support310 may support the second support 320 below the second support 320.

The first support 310 may be provided with two first support 311 and 312to support both sides of the second support 320 at the lower portion.Likewise, the first support unit 330 may also be provided with twosupport units to support both sides of the second support 320 at theupper portion. As such, when the first support unit 330 and the firstsupport 310 each support the second support 320 at the upper and lowerportions with the second support 320 interposed therebetween, the secondsupport 320 may be stably supported, and it is possible to obtain aneffect of distributing the load applied to the second support 320 due tothe weight of the plurality of inkjet head modules 150.

When the first support unit 330 and the first support 310 support thesecond support 320 on the upper and lower portions with the secondsupport 320 interposed therebetween, a plurality of first support units330 may support the second support 320 above the second support 320.However, this exemplary embodiment is not limited thereto. In thisexemplary embodiment, a single first support unit 330 may support thesecond support 320 above the second support 320.

As previously described, a plurality of first supports 310 may supportthe second support 320. In this case, the same number of first supportunits 330 may be disposed above the first supports 310 disposed on eachside. However, this exemplary embodiment is not limited thereto. Adifferent number of first support units 330 may also be disposed abovethe first supports 310 disposed on each side.

Assuming that one first support 311 and the other first support 312 aresupporting the second support 320 at the lower portions of both sides,here, the first support unit 330 supporting the second support 320 aboveone first support 311 is defined as one first support unit 331, and thefirst support unit 330 supporting the second support 320 above the otherfirst support 312 is defined as the other first support unit 332.

In this case, one first support unit 331 may be provided with the samenumber as the other first support unit 332. For example, as illustratedin FIG. 8 , one first support unit 331 and the other first support unit332 may be provided with two support units, respectively. FIG. 8 is across-sectional view schematically illustrating a structure of a loaddistribution apparatus according to a sixth exemplary embodiment of thepresent disclosure.

However, this exemplary embodiment is not limited thereto. One firstsupport unit 331 may be provided with a different number from the otherfirst support unit 332. For example, as shown in FIG. 9 , one firstsupport unit 331 may be provided with two support units, and the otherfirst support unit 332 may be provided with one support unit. FIG. 9 isa cross-sectional view schematically illustrating a structure of a loaddistribution apparatus according to a seventh exemplary embodiment ofthe present disclosure.

In this case, one first support unit 331 may be provided in a largernumber than the other first support unit 332 as shown in FIG. 9 .However, this exemplary embodiment is not limited thereto. One firstsupport unit 331 may be provided in a smaller number than the otherfirst support unit 332.

The first support unit 330 may support the second support 320 in anon-contact manner. The first support unit 330 may be implemented as,for example, a magnet member, and may support the second support 320using an attractive force acting between the first support unit 330 andthe plate 340 disposed thereon.

When the first support unit 330 supports the second support 320 in anon-contact manner as described above, it is possible to reduce asupport weight for a driving shaft so that it is possible to preventoccurrence of a distortion phenomenon (yaw) of each shaft due to theweight of the plurality of inkjet head modules 150, and mechanicaldeformation due to thermal deformation may also be prevented.

As described above, the first support unit 330 may be implemented as amagnet member. For example, the first support unit 330 may beimplemented as a magnet member such as a permanent magnet, anelectromagnet, and the like. However, this exemplary embodiment is notlimited thereto. When the first support unit 330 has a structure capableof compensating for a load on the second support 320 in the non-contactmanner, the first support unit 330 may be implemented by something otherthan the magnet member.

When the first support unit 330 is implemented as the magnet member, thefirst support unit 330 may be implemented as a combination of apermanent magnet 410 and an electromagnet 420 as shown in FIG. 10 . FIG.10 is a cross-sectional view schematically illustrating a structure of aload distribution apparatus according to an eighth exemplary embodimentof the present disclosure.

However, this exemplary embodiment is not limited thereto. The firstsupport unit 330 may be implemented as only the permanent magnet 410 asshown in FIG. 11 or may be implemented as only the electromagnet 420 asshown in FIG. 12 . FIG. 11 is a cross-sectional view schematicallyillustrating a structure of a load distribution apparatus according to aninth exemplary embodiment of the present disclosure, and FIG. 12 is across-sectional view schematically illustrating a structure of a loaddistribution apparatus according to a tenth exemplary embodiment of thepresent disclosure.

When the first support unit 330 is implemented as the combination of thepermanent magnet 410 and the electromagnet 420, the electromagnet 420may be disposed in a center thereof, and the permanent magnet 410 may bedisposed on both sides thereof. When the first support unit 330 isimplemented as the combination of the permanent magnet 410 and theelectromagnet 420, an arrangement structure of the permanent magnet 410and the electromagnet 420 may be variously designed at the discretion ofthose skilled in the art.

Meanwhile, when the electromagnet 420 is disposed in the center thereofand the permanent magnet 410 is disposed on both sides thereof, thepermanent magnet 410 disposed on one side of the electromagnet 420 andthe permanent magnet 410 disposed on the other side of the electromagnet420 may have different polarities. For example, the permanent magnet 410disposed on one side of the electromagnet 420 may have a polarity ofS-pole-N-pole in the third direction 30, and the permanent magnet 410disposed on the other side of the electromagnet 420 may have a polarityof N-pole-S-pole in the third direction 30. However, this exemplaryembodiment is not limited thereto. The permanent magnet 410 disposed onone side of the electromagnet 420 and the permanent magnet 410 disposedon the other side of the electromagnet 420 may have the same polarity.

The first support unit 330 may be implemented as a plurality of magnetmembers. In this case, the first support unit 330 may support the secondsupport 320 in a non-contact manner using active magnetic bearings, thatis, a tripod floater. The first support unit 330 may distribute theself-weight of the inkjet head module 150 to each magnet membertherethrough, and accordingly, it is possible to obtain an effect thatthe inkjet head module 150 may freely operate. Meanwhile, the firstsupport unit 330 may also be implemented as a single magnet member.

The first support unit 330 may serve to support the second support 320by fixing the position thereof, but it is also possible to move thesecond support 320 to a predetermined position. The first support unit330 may change a direction in which a magnetic field is formed accordingto Fleming's law to move the second support 320 to the predeterminedposition.

Meanwhile, the first support unit 330 may be fastened to the secondsupport 320 using a steel structure 350. However, this exemplaryembodiment is not limited thereto. The first support unit 330 may befastened to the second support 320 using a combination of a bolt and anut.

This will be described again with reference to FIG. 3 .

The plate 340 supports the second support 320 through interaction withthe first support unit 330. The plate 340 may be disposed above thefirst support unit 330 to support the second support 320 using anattractive force with the first support unit 330.

The plate 340 may be formed in a large area to freely operate the inkjethead module 150. The plate 340 may be formed to have the same area asthe base 110 and may be formed to have an area larger than the base 110.

When the first support unit 330 is implemented as a magnet member, theplate 340 may be made using a metal component as a material for theattractive force with the first support unit 330. For example, the plate340 may be made using a steel as a material.

Meanwhile, the first support 310 may also support the second support 320in a non-contact manner like the first support unit 330. Hereinafter,this will be described.

FIG. 13 is a cross-sectional view schematically illustrating a structureof a load distribution apparatus according to an eleventh exemplaryembodiment of the present disclosure. The following description refersto FIG. 13 .

The second support unit 360 is installed on the first support 310 tosupport the second support 320 in a non-contact manner. The secondsupport unit 360 may be implemented as an air bearing. However, thisexemplary embodiment is not limited thereto. The second support unit 360may be implemented by something other than the air bearing when thesecond support unit 360 may effectively support the second support 320in the non-contact manner.

When the load distribution apparatus 300 is configured to include thefirst support unit 330 and the second support unit 360, the same amountof load may be distributed to the first support unit 330 and the secondsupport unit 360. However, this exemplary embodiment is not limitedthereto. It is also possible to distribute loads of different amounts tothe first support unit 330 and the second support unit 360.

When the first support unit 330 is formed in an arrangement structure ofthe permanent magnet 410—the electromagnet 420—the permanent magnet 410,and loads of different amounts are distributed to the first support unit330 and the second support unit 360, for example, the permanent magnet410, the electromagnet 420, and the second support unit 360 may beloaded at 60%, 20% and 20%, respectively. In this case, nominalclearances of the permanent magnet 410, the electromagnet 420, and thesecond support unit 360 may be set to 1.5 mm, 1.0 mm, and 5 μm,respectively.

Meanwhile, the load distribution apparatus 300 may further include aheight control member 370 adjusting a height of the plate 340.Hereinafter, this will be described.

FIG. 14 is a cross-sectional view schematically illustrating a structureof a load distribution apparatus according to a twelfth exemplaryembodiment of the present disclosure. The following description refersto FIG. 14 .

The height control member 370 adjusts the height of the plate 340. Aplurality of height control members 370 may be installed in an outerdirection of the first support 310.

As shown in FIG. 15 , the height control member 370 may raise the heightof the plate 340 in a direction away from an upper portion of the firstsupport 310 (i.e., the positive third direction 30). As described above,when the height control member 370 raises the height of the plate 340,the attractive force acting between the first support unit 330 and theplate 340 may be weakened, and accordingly, the load of the inkjet headmodule 150 applied to the first support 310 may be weighted. FIG. 15 isa cross-sectional view schematically illustrating a structure of a loaddistribution apparatus according to a thirteenth exemplary embodiment ofthe present disclosure.

On the other hand, as shown in FIG. 16 , the height control member 370may lower the height of the plate 340 in a direction that approaches theupper portion of the first support 310 (i.e., the negative thirddirection 30). As described above, when the height control member 370lowers the height of the plate 340, the attractive force acting betweenthe first support unit 330 and the plate 340 may be strengthened, andaccordingly, it is possible to reduce the load of the inkjet head module150 applied to the first support 310. FIG. 16 is a cross-sectional viewschematically illustrating a structure of a load distribution apparatusaccording to a fourteenth exemplary embodiment of the presentdisclosure.

As shown above, the height control member 370 may adjust the height ofthe plate 340 to increase or decrease the load of the inkjet head module150 applied to the first support 310.

Meanwhile, when the load distribution apparatus 300 does not include theheight control member 370, the plate 340 may be disposed on the firstsupport unit 330 through a column member 380 as shown in FIG. 17 . FIG.17 is a cross-sectional view schematically illustrating a structure of aload distribution apparatus according to a fifteenth exemplaryembodiment of the present disclosure.

In the above description, a case in which the load distributionapparatus 300 supports the second support 320 in a non-contact mannerthrough the first support unit 330 and the second support unit 360 hasbeen described. However, this exemplary embodiment is not limitedthereto. The load distribution apparatus 300 may support the secondsupport 320 in a contact manner as shown in FIGS. 18 and 19 . When theload distribution apparatus 300 is configured to include first supports311 and 312 of a dual type, as shown in FIG. 18 , the second support 320may be supported in the contact manner, and when the load distributionapparatus 300 is configured to include a first support 311 of a singletype, the second support 320 may be supported in the contact manner asshown in FIG. 19 .

When the load distribution apparatus 300 supports the second support 320in the contact manner, the second support 320 may be fixed to the firstsupport 310 using a plurality of fixing members 390. FIG. 18 is across-sectional view schematically illustrating a structure of a loaddistribution apparatus according to a sixteenth exemplary embodiment ofthe present disclosure, and FIG. 19 is a cross-sectional viewschematically illustrating a structure of a load distribution apparatusaccording to a seventeenth exemplary embodiment of the presentdisclosure.

The load distribution apparatus 300 according to an exemplary embodimentof the present disclosure has been described above with reference toFIGS. 3 to 19 . The load distribution apparatus 300 may suppress thedistortion phenomenon and thermal deformation through the distributionof the loads of the plurality of inkjet head modules 150, and inparticular, it is possible to minimize the distortion of the pluralityof inkjet head modules 150 through load distribution in the non-contactmanner, and it is possible to obtain an effect of reducing vibration.

Although the exemplary embodiments of the present disclosure have beendescribed with reference to the accompanying drawings, it should beclear to those of ordinary skill in the art to which the presentdisclosure pertains that the present disclosure can be implemented inother specific forms without changing the technical spirit or essentialfeatures of the present disclosure. Therefore, it should be understoodthat the exemplary embodiments described above are illustrative andnon-limiting in all respects.

What is claimed is:
 1. A load distribution apparatus comprising: a second support formed to be elongated in one direction and having both side portions higher than a central portion and in which a head module discharging droplets onto a substrate is installed in the central portion; a first support configured to support the second support on at least one side and support the second support below the second support; a first support unit configured to support the second support on at least one side and support the second support above the second support; and a plate installed above the first support unit and connected to the first support unit, wherein a load of the head module is distributed by the first support and the first support unit.
 2. The load distribution apparatus of claim 1, wherein the first support unit supports the second support in a non-contact manner.
 3. The load distribution apparatus of claim 2, wherein the first support unit supports the second support using a magnet member, and the plate is formed of a metal component as a material.
 4. The load distribution apparatus of claim 3, wherein the magnet member includes at least one of a permanent magnet and an electromagnet.
 5. The load distribution apparatus of claim 4, wherein when the magnet member includes both the permanent magnet and the electromagnet, the permanent magnet is disposed on both sides of the electromagnet.
 6. The load distribution apparatus of claim 5, wherein when the permanent magnet is disposed on the both sides of the electromagnet, the permanent magnet disposed on one side of the electromagnet has a different polarity from the permanent magnet disposed on the other side of the electromagnet.
 7. The load distribution apparatus of claim 4, wherein the magnet member includes a plurality of magnets.
 8. The load distribution apparatus of claim 1, wherein at least one first support unit is installed on each side.
 9. The load distribution apparatus of claim 1, wherein the first support units are installed on at least both sides, and the number of the first support units installed on each side is the same.
 10. The load distribution apparatus of claim 1, wherein the first support unit moves the second support according to a direction in which a magnetic field is formed.
 11. The load distribution apparatus of claim 1, further comprising a second support unit installed on the first support and configured to support the second support in a non-contact manner.
 12. The load distribution apparatus of claim 11, wherein the second support unit is an air bearing.
 13. The load distribution apparatus of claim 11, wherein the loads of the head module of different amounts are distributed to the first support unit and the second support unit.
 14. The load distribution apparatus of claim 11, wherein the first support unit and the second support unit support the second support using members of different types.
 15. The load distribution apparatus of claim 1, further comprising a height control member configured to adjust a height of the plate.
 16. The load distribution apparatus of claim 1, wherein the second support is installed to be movable on the first support.
 17. The load distribution apparatus of claim 1, wherein the head module is installed on a side surface or bottom of the second support and is installed to be movable in a lateral direction.
 18. A load distribution apparatus comprising: a second support formed to be elongated in one direction and having both side portions higher than a central portion and in which a head module discharging droplets onto a substrate is installed in the central portion; a first support configured to support the second support on at least one side and support the second support below the second support; a first support unit configured to support the second support on at least one side and support the second support above the second support; a plate installed above the first support unit and connected to the first support unit; and a second support unit installed on the first support and configured to support the second support in a non-contact manner, wherein a load of the head module is distributed by the first support and the first support unit, and the first support unit and the second support unit support the second support using members of different types.
 19. A substrate treatment system comprising: a base; a substrate support unit installed on the base and configured to support a substrate; and a load distribution apparatus installed on the base and including a head module discharging droplets onto the substrate, wherein the load distribution apparatus includes: a second support formed to be elongated in one direction and having both side portions higher than a central portion and in which the head module discharging droplets onto the substrate is installed in the central portion; a first support configured to support the second support on at least one side and support the second support below the second support; a first support unit configured to support the second support on at least one side and support the second support above the second support; and a plate installed above the first support unit and connected to the first support unit, and a load of the head module is distributed by the first support and the first support unit.
 20. The substrate treatment system of claim 19, wherein the substrate treatment system is printing equipment. 